Satoshi Kagatsume, Seiichi Iida, Tomio Uno, Michio Yamaji, Nobukazu Ikeda, Jun Hirose, Kouji Nishino, Mutsunori Koyomogi, Eiji Ideta, Ryousuke Dohi, Takashi Hirose, Kazuhiro Yoshikawa, Tadahiro Ohmi,
Method for detecting plugging of pressure flow-rate controller and sensor used therefor ,(1999)