Fabrication of a high-throughput near-field optical probe using a double metal layer
作者： D W Kim , M J Park , C H Han , S S Choi
DOI: 10.1088/0957-4484/16/5/032
关键词:
摘要: Metal-coated oxide nano-aperture arrays have been fabricated using a micro-fabrication technique including stress-dependent oxidation, an isotropic wet etching of silicon oxide, and the metal deposition. Au, Al, Al/Ti double layers deposited on nano-size aperture in order to provide better uniformity coated film ideal shape. The introduction Ti buffer layer reduced surface roughness during reflow process Al deposition resulted circular type
sci-hub.se 参考文章(11)
Afshin Partovi, David Peale, Matthias Wuttig, Cherry A. Murray, George Zydzik, Leslie Hopkins, Kirk Baldwin, William S. Hobson, James Wynn, John Lopata, Lisa Dhar, Rob Chichester, James H-J Yeh, High-power laser light source for near-field optics and its application to high-density optical data storage Applied Physics Letters. ,vol. 75, pp. 1515- 1517 ,(1999) , 10.1063/1.124740
T. Saiki, S. Mononobe, M. Ohtsu, N. Saito, J. Kusano, Tailoring a high‐transmission fiber probe for photon scanning tunneling microscope Applied Physics Letters. ,vol. 68, pp. 2612- 2614 ,(1996) , 10.1063/1.116198
R. C. Davis, C. C. Williams, P. Neuzil, Micromachined submicrometer photodiode for scanning probe microscopy Applied Physics Letters. ,vol. 66, pp. 2309- 2311 ,(1995) , 10.1063/1.114223
H. J. Mamin, B. D. Terris, L. S. Fan, S. Hoen, R. C. Barrett, D. Rugar, High-density data storage using proximal probe techniques Ibm Journal of Research and Development. ,vol. 39, pp. 681- 700 ,(1995) , 10.1147/RD.396.0681
Y. Martin, S. Rishton, H. K. Wickramasinghe, Optical data storage read out at 256 Gbits/in. 2 Applied Physics Letters. ,vol. 71, pp. 1- 3 ,(1997) , 10.1063/1.119458
K. Okamoto, S. Kawata, Radiation Force Exerted on Subwavelength Particles near a Nanoaperture Physical Review Letters. ,vol. 83, pp. 4534- 4537 ,(1999) , 10.1103/PHYSREVLETT.83.4534
Yoshinobu Mitsuhashi, Optical Storage: Science and Technology. Japanese Journal of Applied Physics. ,vol. 37, pp. 2079- 2083 ,(1998) , 10.1143/JJAP.37.2079
A. Ashkin, Acceleration and trapping of particles by radiation pressure Physical Review Letters. ,vol. 24, pp. 156- 159 ,(1970) , 10.1103/PHYSREVLETT.24.156
C. Mihalcea, W. Scholz, S. Werner, S. Münster, E. Oesterschulze, R. Kassing, Multipurpose sensor tips for scanning near-field microscopy Applied Physics Letters. ,vol. 68, pp. 3531- 3533 ,(1996) , 10.1063/1.116520
William L. Barnes, Alain Dereux, Thomas W. Ebbesen, Surface plasmon subwavelength optics Nature. ,vol. 424, pp. 824- 830 ,(2003) , 10.1038/NATURE01937