Advances of SiC-based MOS capacitor hydrogen sensors for harsh environment applications
作者： Mun Teng Soo , Kuan Yew Cheong , Ahmad Fauzi Mohd Noor
DOI: 10.1016/J.SNB.2010.09.059
关键词:
摘要: … There are several published papers which review SiC gas sensors (Table 1). This review … in this case, which simultaneously require high temperature and high power operation, will …
elsevier.com
sci-hub.se 参考文章(150)
C. C. Liu, Liang-Yu Chen, Dak Knight, Philip G. Neudeck, Gary W. Hunter, Q. H. Wu, SiC-Based Gas Sensors ,(1997)
Anita Lloyd Spetz, Magnus Skoglundh, Lars Ojamäe, FET Gas-Sensing Mechanism, Experimental and Theoretical Studies Solid State Gas Sensing : Fundamentals and new trends in gas sensing. pp. 1- 27 ,(2009) , 10.1007/978-0-387-09665-0_4
Andreas Mandelis, Constantinos Christofides, Physics, chemistry, and technology of solid state gas sensor devices ,(1993)
Ingemar Lundström, None, Hydrogen sensitive mos-structures: Part 1: Principles and applications Sensors and Actuators. ,vol. 1, pp. 403- 426 ,(1981) , 10.1016/0250-6874(81)80018-2
A. L. Spetz, I. Lundström, L.-G. Ekedahl, M. Eriksson, Si and SiC based field effect devices TATF'2000 International Symposium on Trends and Applications of Thin Films. ,vol. 55, pp. 72- 81 ,(2000)
Myron Joel Rand, Ohmic contacts to silicon ,(1973)
Shinji Nakagomi, Yoshihiro Kokubun, Hideyuki Watanabe, Large Voltage-Response of Pt-TiOx-SiC Diode to Hydrogen Gas (Proceedings of The 5Th East Asian Conference on Chemical Sensors: The 33RD Chemical Sensor Symposium) Proceedings of the Chemical Sensor Symposium. ,vol. 33, pp. 50- 52 ,(2001)
Michael Shur, Sergey Rumyantsev, M. E. Levinshteĭn, SiC materials and devices World Scientific. ,(2006)
竜也 菊地, 212th ECS Meeting Zairyo-to-kankyo. ,vol. 57, pp. 186- 187 ,(2008)
G. Pensl, 弘之 松波, W. J. Choyke, Silicon carbide : recent major advances Springer. ,(2004)