Study on carbon coating films produced in Heliotron-E
作者： H. Minagawa , T. Hino , T. Yamashina , M. Watanabe , N. Noda
DOI: 10.1016/0022-3115(89)90362-0
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摘要: Abstract In the Heliotron-E device, carbonization experiments were successfully performed by using a DC glow discharge in mixture gas of hydrogen and methane. The properties carbon films produced on surface probes analyzed Auger Electron Spectroscopy (AES), X-ray Photoelectron (XPS) Raman (RS). Film thickness varied between 17 40 nm, almost no metal impurities found film layer. Both radial toroidal distributions analyzed. uniformity was within factor two. structure amorphous carbon, while that TEXTOR graphite. According to depth profile analysis, could hardly be eroded main discharges. But D2 or He cleaning effectively removed film. addition, after with Ti-flashing carbonized chamber, formation TiC region observed.
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