A phononic crystal strip based on silicon for support tether applications in silicon-based MEMS resonators and effects of temperature and dopant on its band gap characteristics
作者： Thi Dep Ha , JingFu Bao
DOI: 10.1063/1.4947452
关键词:
摘要: Phononic crystals (PnCs) and n-type doped silicon technique have been widely employed in silicon-based MEMS resonators to obtain high quality factor (Q) as well temperature-induced frequency stability. For the PnCs, their band gaps play an important role acoustic wave propagation. Also, temperature dopant into can cause change its material properties such elastic constants, Young’s modulus. Therefore, order design simultaneous Q stability by two these techniques, a careful should study effects of on gap characteristics examine propagation PnC. Based these, this paper presents (1) proposed PnC strip structure for support tether applications low resonators, (2) influences strips. The simulation results show that largest band...
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