Improvement and characterization of high-reflective and anti-reflective nanostructured mirrors by ion beam assisted deposition for 944 nm high power diode laser
作者： A. Ghadimi-Mahani , E. Farsad , A. Goodarzi , S. Tahamtan , S.P. Abbasi
DOI: 10.1016/J.OPTCOM.2015.06.021
关键词:
摘要: Abstract Single-layer and multi-layer coatings were applied on the surface of diode laser facets as mirrors. This thin film mirrors designed, deposited, optimized characterized. The effects facet passivation optical properties InGaAs/AlGaAs/GaAs lasers investigated. High-Reflective (HR) Anti-Reflective (AR) comprising four double-layers Al 2 O 3 /Si a single layer , respectively, designed by Macleod software for 944 nm lasers. Optimization Argon flow rate was studied through Alumina deposition Ion Beam Assisted Deposition (IBAD) mirror improvement. nanostructured HR AR deposited front back IBAD system under optimum condition. Atomic Force Microscope (AFM), Vis-IR Spectrophotometer, Field Emission Scanning Electron Microscopy (FESEM) characterization Test ( P – I ) used to characterize various AFM images show mirror’s root mean square roughness is nearly 1 nm. Spectrophotometer results transmission reflection are in good agreement with simulation results. Optical output power versus driving current characteristics, measured before after coating facet, revealed significant enhancement due facets.
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