A crucible device used in coating system
作者： Yung-Jui Lee , Xindi Zhang
DOI:
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摘要: The present invention discloses a crucible device used in coating system. system comprise barrel structure, plurality of heaters, crucible, temperature sensors, and driving means, the heaters are arranged vertical direction structure to heat materials sensors measure inside means drive at least one move so as control crucible. By this way, evaporation rate can be controlled stay stable.
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