Very Thin Silicon Nitride Films Grown by Direct Thermal Reaction with Nitrogen

,1988, 引用: 1

,1997, 引用: 7

,2004, 引用: 22

Surface Science,2001, 引用: 47

,1995, 引用: 4

Instabilities in Silicon Devices,1999, 引用: 4

Applied Physics Letters,1997, 引用: 26

Thin Solid Films,2005, 引用: 6

Surface Science,1985, 引用: 15

Applied Physics Letters,2014, 引用: 11