Process for producing ITO sintered body

摘要: An indium oxide-tin oxide (ITO) sintered body is prepared by mixing a tin powder with an powder, molding the resulting mixed to obtain green body, and sintering body. At least has beforehand been pulverized colliding particles each other or against collision substance in gas streams. 90 wt % of preferably having particle size 0.2-10 μm. A jet mill can be used for pulverization. The ITO density as high 7.08 g/cm3 more and, during sputtering, free from nodule formation inhibited generating particles.