Vessel With Filter
作者： Charles Michael Birtcher , Xinjian Lei , Sergei Vladimirovich Ivanov , Thomas Andrew Steidl
DOI:
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摘要: A vessel for conveying a precursor-containing fluid stream from precursor material contained within the vessel, comprising: an interior volume defined by top, one or more sidewalls, and base; at least outlet vaporized precursor, particle barrier that defines restricted space volume, wherein said comprises 3-dimensional filter. method using apparatus is also disclosed.
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