Optical properties of Ta2O5 thin films deposited using the spin coating process
作者： Farhad E. Ghodsi , Fatma Z. Tepehan , Galip G. Tepehan
DOI: 10.1016/S0040-6090(96)09509-0
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摘要: Abstract Optical properties of tantalum pentoxide thin films have been investigated. The were prepared by the sol-gel method using spin coating process. Refractive index and absorption coefficient calculated with respect to spinning velocity number layers from optical transmission measurement in range 200-1100 nm. Forbidden bandgaps are found be 3.75 ± 0.12 eV independent film thickness rate.
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