Semiconductor electret capacitor microphone

作者: Takanobu Takeuchi

DOI: 10.1121/1.2040238

关键词:

摘要: A semiconductor electret capacitor microphone includes a vibration membrane, chip on which are formed necessary electronic circuit, fixed electrode, spacer for preserving predetermined space between the electrode and case enclosing membrane in such configuration that is connected to ground an input of chip.

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