Self-assembled biofilm of hydrophobins protects the silicon surface in the KOH wet etch process

摘要: The anisotropic wet micromachining of silicon, based on a water solution potassium hydroxide (KOH), is standard fabrication process that extensively exploited in the realization very complex microsystems, which comprise cantilevers, membranes, and bridges. A nanostructured self-assembled biofilm amphiphilic proteins, hydrophobins, was deposited crystalline silicon by deposition characterized variable-angle spectroscopic ellipsometry (VASE). This procedure formed chemically mechanically stable mono- multilayers proteins. biomolecular membrane has been tested as masking material KOH etch silicon. monitored VASE atomic force microscopy measurements. Because high persistence protein biofilm, hydrophobin-coated surface perfectly protected during process.