Simple method for the determination of optical parameters of inhomogeneous thin films

作者: Liberato De Caro , Maria Cristina Ferrara

DOI: 10.1016/S0040-6090(98)01483-7

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摘要: In this work, we propose a new method for the determination of optical parameters an inhomogeneous thin film deposited on substrate finite thickness. The can be applied successfully, if following hyphotheses are satisfied: exhibits small inhomogeneities throughout thickness (less than 5%), smooth refractive index profiles, weak absorption (extinction coefficient ≤ 0.02) and negligible diffuse light scattering. Useful formulae derived describing effects refractive-index inhomogeneity not only transmittance reflectance extrema but also any other wavelength value. This allows us to calculate subtract its contribution from measured curves starting approximate refraction values. way, it is possible obtain spectra homogeneous whose mean values those film. These easily processed with computer program based model.

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