Hydrocarbon formation on carbon surfaces facing a hydrogen plasma

作者: Egon Vietzke , Volker Philipps

DOI: 10.13182/FST89-A25333

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摘要: The hydrocarbon formation of carbon materials exposed to hydrogen atoms and ions is reviewed. It turns out that surface conditions modification play a major role in formation. Graphite plasma exhibits properties similar those amorphous hydrogenated films redeposited films. total chemical erosion yield these for thermal atomic energetic ions, reaching maximum values --0.1 eroded per incoming hydrogen. However, the spectrum formed hydrocarbons determined by energy impinging

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