Preparation of BaTiO3Thin Film by Hydrothermal Electrochemical Method

作者： Masahiro Yoshimura , Seung-Eul Yoo , Motoo Hayashi , Nobuo Ishizawa

DOI: 10.1143/JJAP.28.L2007

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摘要: BaTiO3 thin films have been prepared in situ on Ti metal substrates by a hydrothermal electrochemical technique, where direct current has passed between the anode, plate, and cathode, Pt high-temperature, high-pressure Ba2+ solutions. Dense films, 0.1~0.3 µm thick, which consist of cubic polycrystals without apparent pores or defects obtained under following conditions: 0.25~0.5 N-Ba(OH)2 solutions above 100°C saturated vapor pressures with density 10~100 mA/cm2 after 30~80 min. These are paraelectric dielectric constant ≈300.