Low‐Temperature MOCVD of Crystalline Ga2O3 Nanowires using tBu3Ga

作者: Stephan Schulz , Georg Bendt , Wilfried Assenmacher , Daniel Sager , Gerd Bacher

DOI: 10.1002/CVDE.201307060

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摘要: Crystalline Ga2O3 nanowires are synthesized via an Au-catalyzed, as well a self-catalyzed, growth by low-temperature metal-organic (MO)CVD process using tBu3Ga novel Ga source. Morphology, elemental composition, and crystallinity of the resulting analyzed scanning electron microscopy (SEM), high resolution transmission (HRTEM), energy dispersive X-ray spectroscopy (EDX), diffraction (XRD), selected area (SAED). Photoluminescence (PL) spectra show efficient defect-luminescence in visible UV ranges with blue green emission peaks at 430 nm 512 nm, respectively, room temperature.

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