Photo-assisted silicon micromachining: opportunities for chemical sensing

摘要: Abstract Micromachining methods allow for the fabrication of small, three-dimensional structures including membranes, micro-valves, and pumps, channels, etc., in materials such as silicon. When integrated with microcircuitry this provides opportunity creating unique miniature ‘smart’ chemical sensing devices. We present a novel method photo-assisted electrochemical silicon micromachining which allows stress-free submicrometer thick beams, high aspect ratio structures, whose complex surface topologies were previously inaccessible by conventional processing routes. discuss number gas sensor benefit from MEMS technology would further versatility provided our new method.