Surface-micromachined microfluidic devices
作者： Murat Okandan , James H. Smith , Phillip H. Paul , Paul C. Galambos , James J. Allen
DOI:
关键词:
摘要: Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These utilize an electroosmotic force or electromagnetic field to generate a flow of fluid in microchannel that is lined, at least part, with silicon nitride. Additional electrodes provided within about the for separating particular constituents during based on charge state magnetic moment. The also pressurized channel. present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. electrophoresis chromatography), conducting reactions microscopic scale, forming hydraulic actuators.
osti.gov
google.ru 参考文章(15)
Phillip H. Paul, Don W. Arnold, David J. Rakestraw, Electrokinetic Generation of High Pressures using Porous Microstructures Springer, Dordrecht. pp. 49- 52 ,(1998) , 10.1007/978-94-011-5286-0_11
Ronald P. Manginell, Carolyn M. Matzke, Carol I. H. Ashby, Monica M. Bridges, Formation of microchannels from low-temperature plasma-deposited silicon oxynitride ,(1999)
Michael W. Geis, Nancy Geis, Stephanie A. Gajar, Ionic liquid-channel charge-coupled device ,(1994)
Weiping Yang, Jing Cheng, Junquan Xu, Xiaobo Wang, Litian Liu, Lei Wu, Yuxiang Zhou, Individually addressable micro-electromagnetic unit array chips in horizontal configurations ,(2001)
Christopher A. Apblett, Paul J. McWhorter, Dale L. Hetherington, Robert D. Nasby, Jeffry J. Sniegowski, Use of chemical mechanical polishing in micromachining ,(1996)
Albert P. Pisano, Liwei Lin, IC-processed microneedles ,(1994)
Asuncion V Lemoff, Abraham P Lee, An AC magnetohydrodynamic micropump Sensors and Actuators B-chemical. ,vol. 63, pp. 178- 185 ,(2000) , 10.1016/S0925-4005(00)00355-5
Luc Bousse, Shahriar Mostarshed, The zeta potential of silicon nitride thin films Journal of Electroanalytical Chemistry. ,vol. 302, pp. 269- 274 ,(1991) , 10.1016/0022-0728(91)85046-R
Jene A. Golovchenko, Daniel Branton, Timothy J. Denison, Molecular and atomic scale evaluation of biopolymers ,(2000)
John H. Jerman, Micromachined capillary electrophoresis device ,(1996)