Oxygen plasma-treatment effects on Si transfer.
作者： Bryan A. Langowski , Kathryn E. Uhrich
DOI: 10.1021/LA046795V
关键词:
摘要: Oxygen plasma-treatment is commonly used to increase the hydrophilicity of poly(dimethylsiloxane) (PDMS) stamps for microcontact printing (μCP) aqueous-based inks. Review literature reveals that a wide range plasma parameters are currently employed modify stamp surfaces. However, little known about effect these (e.g., power, chamber pressure, duration) on undesirable transfer low-molecular-weight silicon-containing fragments from occurs during μCP. To study oxygen Si transfer, unpatterned PDMS were treated with under various conditions and deionized water plasma-activated poly(methyl methacrylate) (PMMA) substrates. Once stamped, PMMA substrates analyzed X-ray photoelectron spectroscopy (XPS) quantify characterize silicon present substrate surface. In addition, scanning electron microscopy (SEM) obs...
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