Characterizations of ZnO thin films deposited onto langasite substrates by r.f. magnetron sputtering
作者： Ping-Feng Yang , Hua-Chiang Wen , Sheng-Rui Jian , Yi-Shao Lai , Sean Wu
DOI: 10.1109/IMPACT.2007.4433597
关键词:
摘要: We investigated in this study structural and nanomechanical properties of zinc oxide (ZnO) thin films deposited onto langasite substrates at 200degC through r.f. magnetron sputtering with an power 200 W 02/Ar gas mixture for different deposition time 1, 2, 3 h. Surface morphologies crystalline characteristics were examined using x-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force (AFM). The film featured a polycrystalline nature, (100), (002), (101) peaks hexagonal ZnO 31.75deg, 34.35deg, 36.31deg. As the increased, became predominantly oriented along c-axis (002) surface roughness decreased. Through Berkovich nanoindentation following continuous stiffness measurement (CSM) technique, hardness Young's modulus increased as best results being obtained
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