作者: M Antognozzi , A Ulcinas , L Picco , S H Simpson , P J Heard
DOI: 10.1088/0957-4484/19/38/384002
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摘要: Detection techniques currently used in scanning force microscopy impose limitations on the geometrical dimensions of probes and, as a consequence, their sensitivity and temporal response. A new technique, based scattered evanescent electromagnetic waves (SEW), is presented here that can detect displacement extreme end vertically mounted cantilever. The resolution this method tested using different cantilever sizes theoretical model developed to maximize detection sensitivity. applications clearly show SEW system enables use sensors with sub-micron size, opening possibilities investigation biomolecular systems high speed imaging. Two types cantilevers were successfully tested: lever spring constant 0.17 pN nm−1 resonant frequency 32 kHz; 50 1.8 MHz. Both these fabricated by modifying commercial microcantilevers focused ion beam system. It important emphasize modified could not be detected conventional optical atomic microscopes.