Nitriding of titanium in a radio frequency discharge

摘要: The nitriding of titanium in a nitrogen or nitrogen-hydrogen plasma prepared with radio frequency discharge was studied. Power supplied from an inductively coupled 13.56 MHz 500 W generator. reaction kinetics obeyed parabolic relationship and the constants were 10−12 - 10−10 g2 cm−4s−1 under various conditions. surface nitrided metal hardened by formation TiN. rate-determining steps may be absorption ions diffusion metal.