Hybrid femtosecond laser microfabrication to achieve true 3D glass/polymer composite biochips with multiscale features and high performance: the concept of ship‐in‐a‐bottle biochip

摘要: True three-dimensionally (3D) integrated biochips are crucial for realizing high performance biochemical analysis and cell engineering, which remain ultimate challenges. In this paper, a new method termed hybrid femtosecond laser microfabrication consists of successive subtractive (femtosecond laser-assisted wet etching glass) additive (two-photon polymerization polymer) 3D microprocessing was proposed “ship-in-a-bottle” microchip. Such novel microchips were fabricated by integrating various polymer micro/nanostructures into flexible glass microfluidic channels. The quality ensured quantitatively investigating the experimental processes containing “line-to-line” scanning mode, improved annealing temperature (645°C), increased prebaking time (18 h 1mm-length channel), optimal power (1.9 times larger than that on surface) longer developing (6 larger). ship-in-a-bottle show capabilities to provide simultaneous filtering mixing with 87% efficiency in shorter distance on-chip synthesis ZnO microflower particles.