作者: Mitsuharu Sawamura , Yasushi Taniguchi
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摘要: An ultraviolet reflecting mirror comprises a substrate, high reflection factor film provided on the substrate and having thickness of at least 250 Å light beam by surface thereof, group dielectric material layers comprising one or more sets two low refractive index film. The is optical approximately 1/4(2n-1)λ, where n natural number λ design wavelength 150nm≦λ≦300nm. 3λ/4.