Silicon-based cooling package with diamond coating for heat-generating devices

摘要: Various embodiments of a thermal energy transfer apparatus that removes from heat-generating device are described. In one aspect, comprises silicon-based manifold having an internal cavity, first primary side, and second side opposite the side. The has at least coolant inlet port outlet connected to cavity manifold, being position directly on diamond layer where is received. A covers portion such in direct contact with when received manifold.