Piezoresistive force sensor and thermal actuators usage as applications to nanosystems manipulation: Design, simulations, technology and experiments

摘要: For properties characterization of nanostructured materials and simultaneously to predict their reliability a tensile testing system consisting thermal actuator lateral nano-Newton force piezoresistive sensor is presented. The implementation load in MEMS-based can be regarded as an innovative ultrasensitive method continuously observe the specimen deformation while measuring applied electronically with resolution. primary technique that we have used for fabrication these systems Bonding Deep Reactive Ion Etching (BDRIE) on SOI wafers.