Nanogrinding of soft–brittle monocrystalline mercury cadmium telluride using a ceramic bond ultrafine diamond grinding wheel
作者： Hongxiu Zhou , Chunmei Wang , Dongjie Zhao , Honghao Zhao
DOI: 10.1007/S00170-011-3667-X
关键词:
摘要: Nanogrinding experiments on soft–brittle monocrystalline mercury cadmium telluride (HgCdTe, MCT) were conducted using a novel developed ceramic bond ultrafine diamond grinding wheel. The experimental results showed that the wheel exhibited excellent performance HgCdTe wafers. Surface roughness Ra 1.4 nm, rms 1.7 and PV 10.9 nm respectively achieved under nanogrinding this All ground surfaces of MCT wafers ductile mode character, free cracking burn damage. discussed in terms bond, as well maximum undeformed chip thickness.
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