Transport phenomena in vertical reactors for metalorganic vapor phase epitaxy

摘要: Abstract Effects of operating conditions, reactor geometry, and heat transfer characteristics on flow patterns growth rate uniformity in vertical, axisymmetric reactors for metalorganic vapor phase epitaxy (MOVPE) are described. Finite element solutions two- three-dimensional models transport phenomena vertical MOVPE identify regions inlet rates, susceptor rotations, pressures where recirculations due to natural convection minimized good deposition is achieved. Particular attention placed understanding the influence geometry fields film thickness variations. The numerical computations demonstrate that modifications orientation reactor, size its distance from as well shape enclosure can be used effectively optimize performance. Baffles also advantageously improve existing enclosures but at expense more complex patterns. simulations underscore importance including accurate treatments by illustrating different result commonly thermal boundary conditions a detailed model. model predictions shown agreement with experimentally observed fields, wall temperatures rates GaAs. Nonlinear lead existence multiple steady flows same parameters breaking axisymmetry development fully An example non-axisymmetric field given assumption discussed.