Vertical color filter sensor group and semiconductor integrated circuit fabrication method for fabricating same
作者： Russel A. Martin , Richard B. Merrill
DOI:
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摘要: A vertical color filter sensor group, formed on a substrate (preferably semiconductor substrate) by integrated circuit fabrication process, and including at least two vertically stacked, photosensitive sensors. Other aspects of the invention are arrays such groups, methods for fabricating groups thereof. In some embodiments, group is block solid material having readout surface. At stacked sensors in trench contact provided between one
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