搜索历史记录选项已关闭,请开启搜索历史记录选项。
作者: H. Müller , J. Gyulai , W. K. Chu , J. W. Mayer , T. W. Sigmon
DOI: 10.1149/1.2134432
关键词:
摘要:
Materials Processing: Theory and Practices,1981, 引用: 112
Ion Implantation Science and Technology (Second Edition),1988, 引用: 5
Ion Implantation Science and Technology,1984, 引用: 5
Journal of Applied Physics,1979, 引用: 56
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms,1992, 引用: 5
Applied Physics Letters,1980, 引用: 8
Nuclear Instruments and Methods,1981, 引用: 8
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms,1986, 引用: 13
Solid-state Electronics,1988, 引用: 1
Journal of Applied Physics,1983, 引用: 5