AFM Sensors in Scanning Electron and Ion Microscopes: Tools for Nanomechanics, Nanoanalytics, and Nanofabrication

摘要: In this chapter the synergies upon integration of atomic force microscope sensors in scanning electron and ionmicroscopes are outlined applications presented. Combining capabilities standalone techniques opens world to nanoscale measurements process control. The high-resolution microscopy imaging provides direct visual feedback for analysis specific sample features individual nanostructures. Fundamental static dynamicmechanics cantilever beams reviewed with an emphasis on usage as mass a vacuum. Static sensing is applied probe mechanical properties nanowires tensile, bending compression experiments dynamic used AFM SEM applications. Cantilever-based discussed measure material deposited or etched using ion beam inherent microscope.