Rehabilitation of MgO(001) Substrate Surface for Growth of Single-Crystal LaBaCo2O5+δ Films by Magnetron Sputtering
作者： Q. Y. Zhang , J. Shaibo , J. Ju , M. Liu , S. Cheng
关键词:
摘要: Single-crystal films are at the foundation of a number advanced technologies, such as for devices related to microelectronics, optoelectronics, spintronics, and superconducting electronics. In this study, high-temperature annealing was used rehabilitate MgO(001) surface improve crystallinity highly epitaxial LaBaCo2O5+δ (LBCO) films, which have demonstrated potential applications in fast gas sensors. comparison with LBCO film grown on as-received substrate, solid evidence is presented support that rehabbed substrates facilitate deposition single-crystal by radio frequency magnetron sputtering optimized conditions. Thus, substrate be practical effective method rehabbing damaged induced manufacture milling promising range important based growth films.
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