Interferometric contact-free measuring method for sensing motional surface deformation of workpiece subjected to ultrasonic wave vibration
作者： Tohru Iuchi , Fumio Tanaka
DOI:
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摘要: An interferometric contact-free measuring method for sensing, by a laser beam, motional surface deformation of workpiece subject to an ultrasonic vibration, comprising splitting the beam into incident upon point on and reference close point, bringing two beams, after reflection, common optical detector.
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