A mechanical and modelling study of magnetron sputtered cerium-titanium oxide film coatings on Si (100)
作者： Shyam Bharatkumar Patel , Nik Radevski , Nicholas Mondinos , Xiaoli Zhao , Kevin Jack
DOI: 10.1016/J.CERAMINT.2018.12.183
关键词:
摘要: Ce/Ti mixed metal oxide thin films have well known optoelectrical properties amongst several other physio-chemical properties. Changes in the structural and mechanical of magnetron sputtered on Si (100) wafers with different Ce:Ti ratios are investigated experimentally by modelling. X-ray Photoemission Spectroscopy (XPS) diffraction (XRD) confirm primary phases as trigonal Ce2O3 rutile form TiO2 SiO2 present all prepared materials. FESEM imaging delivers information based variation grain size, oxides providing much smaller sizes film/substrate composite. Nanoindentation analysis concludes that pure cerium film has highest hardness value (20.1 GPa), while addition excess titanium decreases coatings. High temperature in-situ XRD (up to 1000 degrees C) results indicate high thermal phase stability for materials studied. The = 68%:32% a new additional minor above 800 C. Contact angle experiments suggest chemical composition surface is insignificant affecting water contact angle. Results show narrow band 87.7-95.7 finite element modelling (FEM) coatings Si(100); Si(110); silica steel substrates shows stress concentration.
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