Method for forming a patterned semiconductor film
作者： Peter Kazlas , Jianna Wang , Paul S. Drzaic , Gregg Duthaler , Karl Amundson
DOI:
关键词:
摘要: A process for forming a pattern in semiconductor film is provided. The comprises the steps of: providing substrate; an organic adjacent and destructive agent selected portions of film, changing property substantially through full thickness such that differs from remaining film. method manufacturing transistor gate electrode dielectric substrate electrode; source drain dielectric; mask electrode, portion remain exposed; layer comprising one plurality inorganic colloidal particles, mask, thereby transistor, having less than mask.
google.it 参考文章(260)
Maurice H. Hanes, Karl F. Schoch, Francis H. Ruddy, John Bartko, Production of highly conductive polymers for electronic circuits ,(1988)
Mats Robertsson, Olle Jonny Hagel, Goran Gustafsson, Optoelectric multichip module ,(1999)
Ian D. French, Nigel D. Young, David J. McCulloch, Soo Y. Yoon, Method of manufacturing an electronic device comprising a thin film transistor ,(2003)
Denis Fichou, Francis Garnier, Gilles Horowitz, Thin-layer field-effect transistors with MIS structure whose insulator and semiconductor are made of organic materials ,(1991)
Ananth Dodabalapur, Howard E. Katz, Joerg Baumbach, Article comprising complementary circuit with inorganic n-channel and organic p-channel thin film transistors ,(1996)
Jonathan Albert, Barrett Comiskey, Joseph M. Jacobson, Improved microencapsulated electrophoretic display ,(1998)
Theo Siegrist, Robert Cort Haddon, Paul Michael Bridenbaugh, Robert Alfred Laudise, Robert Mclemore Fleming, Article comprising .alpha.-hexathienyl ,(1996)
Minoru Takaochi, Kenichi Co-Op Nomuraoike Masaki, Liquid-crystal multi-color display device. ,(1985)
Francis Garnier, Maryse Gazard, rard Tourillon, Electrode comprising an electrochrome polymer film and a display device using such an electrode ,(1983)
Etienne Hannecart, Marc Lemaire, Jean Roncali, Werner Buechner, Robert Garreau, Françis Garnier, Fluorinated thiophenes, conductive polymers from these thiophenes, process for their obtention and devices containing these polymers ,(1990)