Impact of Improved Design on Knudsen Force for Micro Gas Sensor
作者： Xiaowei Wang , Zhijun Zhang , Wenqing Zhang , Tianyi Su , Shiwei Zhang
DOI: 10.3390/MI11070634
关键词:
摘要: Knudsen force generated by thermally driven gas flow in a microscale structure has been used for detection and shown immeasurable potential the field of microelectromechanical system (MEMS) sensors due to its novel sensing characteristics. In this article, performances three kinds with improved isosceles triangular shuttle arm structures were studied. first design, top side right lengths equal; second, bottom third, equal. A detailed investigation including flow, thermal characteristics, force, coupling effects between shuttle-heater pairs was conducted using direct simulation Monte Carlo (DSMC) method main mechanisms presented almost same work. However, second design returned highest performance. The value increased 42.9% (P = 387 Pa) compared original square arm. results also demonstrate that become weak toward an increase number pairs.
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