Electrical and structural properties of low resistivity tin‐doped indium oxide films
作者： Yuzo Shigesato , Satoru Takaki , Takeshi Haranoh
DOI: 10.1063/1.350931
关键词:
摘要: … The detailed structural analyses using x-ray diffraction, ESCA, and SEM revealed that the conventional SP film showed low crystallinity with many crystallographic faults caused by the …
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