Method for the operation of an electron beam

摘要: A method is disclosed for the operation of a high-power electron beam vaporization materials in target. With this method, static and dynamic deflection errors are corrected. First, ascertained by means teach-in process concrete spatial coordinates frequencies currents stored memory. For later operation, data used such way that input geometric incidence points automatically recalculated into corrected current values which bring about exact onto points. corresponding procedure takes place with current. The terms frequency amplitude order to eliminate frequency-dependent attenuation effects. Both correction it guaranteed suitable interpolation methods even not considered taken account. Finally, specified possible mere specification power distribution on crucible surface control satisfied.