MODELING AND SIMULATION OF PIEZOELECTRIC MEMS ENERGY HARVESTING DEVICE
作者： J. H. LIN , X. M. WU , T. L. REN , L. T. LIU
DOI: 10.1080/10584580701756649
关键词:
摘要: ABSTRACT Piezoelectric MEMS power generator is used to harvest energy from the ambient vibrations in environment. This paper proposes a structure design of for low-frequency applications, which based on bulk technology and (110) Si wafer. The consists silicon cantilever with piezoelectric layer attached. modeled as an Euler-Bernoulli beam lumped mass beneath tip cantilever, then analytical modeling simulations are carried out using MATLAB. Simulation results show that tradeoff between geometric parameters proof should be made high output device. To increase power, length can optimized, not necessarily equal cantilever. point ways perform optimization generator. also helpful macro-scale
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