Zn-Doped SnO2 with 3D Cubic Structure for Humidity Sensor
作者： N.D. Md Sin , Noorlaily Samsudin , S. Ahmad , M.H. Mamat , M. Rusop
DOI: 10.1016/J.PROENG.2013.03.199
关键词:
摘要: Abstract Zinc doped tin oxide (Zn-doped SnO2) with three dimension (3D) cubic structure has been successfully grown on top of ZnO thin film. In this research, films prepared by rf magnetron sputtering and Zn-doped SnO2 developed immersion method at low temperature are reported. The effects Zn doping concentration (0 to 5 at.%) the were studied form structure. performance humidity sensor was tested using current-voltage (I-V) measurement (Keithley 2400) in a controlled chamber. structural characterization performed field emission scanning electron microscopy (FESEM). 5% found be highly sensitive can used as sensor. size decreases increase concentration.
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