Fixture to support reel-to-reel inspection of semiconductor devices or other components
作者： Jason L. Wheeler , Stephen T. Fasolino , Joshua Ng
DOI:
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摘要: A system includes a component inspection (200) having radiation source (202) configured to generate and detector (204) detect the after passes through components be inspected. The also fixture (100) receive multiple reels (502, 504) that are each tape (506) in or on which located. base (102) secured support, shaft (104), one more motors (108, 110) mounted rotate reels, joints (106) coupling base. allow (i) rotation of about longitudinal axis change an orientation with respect (ii) direction at extends away from
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