Design, Fabrication and Testing of Angled Fiber Suspension for Electrostatic Actuators

摘要: A suspension comprised of angled fibers is proposed as a new means for achieving high strain, stress, energy dense electrostatic actuators. Angled fiber arrays have low density and can be placed between the electrodes parallel plate or comb-drive type actuator to create self-contained sheet with mass volume. also Poisson's ratio zero, allowing use robust, rigid electrodes, they composed stiff materials viscoelastic properties. This in contrast alternative technology dielectric elastomers that depend on unreliable compliant highly dielectrics. Performance limits an ideal nanometer-scale actuator, such density, stress efficiency are considered through theoretical modeling. micrometer scale prototype fabricated using novel peeling technique easily produces high-aspect-ratio (1.8 mm radius, 66 long), microfibers. The microfibers used actuator. characterized static dynamic tests, reveal maximum strain 3.4% at 0.8 kPa (electric field 13.9 V/mm), fast unloaded step response <2 ms, Q 12.9 power 12.8 W/kg when driving inertial load resonance 845 Hz.