Fabrication of sub-wavelength surface ripples and in-volume nanostructures by fs-laser induced selective etching

摘要: Abstract Continuous sub-wavelength ripples on the surface of sapphire and fused silica have been produced not only in one dimension but also two dimensions by scanning several tracks with an offset. This results formation extended grating. By investigation cross-sections a surprising high aspect ratio larger than 10 is observed case about 2.5 sapphire. Using in-volume selective laser etching hollow nanoplanes (∼200 nm width, 1 mm length) nano-channels (∼100 nm diameter) are obtained volume silica, structures very similar to volume. A common feed-back mechanism for both coherent discussed.