Method for forming a micro-pattern on a substrate by using capillary force

作者: Pil Jin Yoo , Youn Sang Kim , Kab Yang Suh , Hong Hie Lee

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摘要: In a method for forming micro-pattern on substrate by employing mold having predetermined pattern structure, structure containing recessed portion and protruded is prepared. A polymer material deposited the substrate. Then of controlled to be in contact with incorporated into an empty space thereof using capillary force thereof, thereby removing mold. Thereafter, top surface exposed detaching form

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