Multichannel ellipsometer for real time spectroscopy of thin film deposition from 1.5 to 6.5 eV
作者： J. A. Zapien , R. W. Collins , R. Messier
DOI: 10.1063/1.1288260
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摘要: A rotating polarizer multichannel ellipsometer has been optimized for operation well into the ultraviolet (UV) spectral range. With this instrument, 132 points in ellipsometric parameters (ψ, Δ) over photon energy range from 1.5 eV (827 nm) to 6.5 (191 can be collected a minimum acquisition time of 24.5 ms, corresponding one optical cycle polarizer. Averages two and 80 cycles (obtained 49 ms 1.96 s, respectively) give standard deviations less than (0.04°, 0.08°) (0.007°, 0.015°), respectively, 3.5 6.0 eV, as determined successive measurements stable thermally oxidized silicon wafer. Key modifications previous instrument designs include: (i) tandem in-line Xe/D2 source configuration usable output eV; (ii) MgF2 Rochon polarizers high transmission UV without need activity corrections; (iii) spectrograph with grating blazed a...
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