Semiconductor wafer cassette transportation apparatus and stocker used therein

摘要: A stocker used in a semiconductor wafer cassette transportation apparatus comprises plurality of stockers for storing cassettes. Each manual output and input ports exit entry cassettes by an operator, which each port has ID card reader/writer arranged lower than the bottom surface facing communication arrangement at attached on side cassette. An automatic carrier transports between processing apparatus, inter-stocker transport device stockers. The number that can be mounted is determined according to maximum requested loaded apparatus. embodiment invention includes ports. outer shield door various prevents intrusion foreign objects.