作者: Wun-Shung Lee , Hsien-Wen Ko , Jon-Wey Chu , Fu-Hsiang Wang
DOI:
关键词:
摘要: The present invention herein relates to a sample injection device for micro gas chromatograph is assembled from five layers of thin plates and membrane. first layer serves as cover plate interfacial connection outside columns. second fabricated with channel carrier inlet split into an analytical reference channel, two valve seats. third flexible diaphragm actuation. fourth pressurizing hole leading the diaphragms fifth another plate. An external solenoid used control processes sampling injection. channels seats on each can be through several well-developed fabrication techniques such photolithographic, LIGA or precision machining. All are properly aligned bonded by adhesives.