Method for producing a solar cell
作者： Katsuhiko Shirasawa , Yosuke Inomata
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摘要: A substrate processing apparatus that roughens the surface of a through dry etching method by covering to be processed with plate provided number opening portions. The is portions in such manner an open area ratio on peripheral side smaller than central portion when viewed plane. It thus possible form textures efficiently and homogenously, which turn makes it manufacture highly efficient solar cells or like at low cost.
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