Radiation-Enhanced Plastic Flow of Covalent Materials During Ion Irradiation
作者： C. A. Volkert , A. Polman
DOI: 10.1557/PROC-235-3
关键词:
摘要: Plastic deformation of several covalently-bound materials has been studied during ion irradiation. In all these materials, namely crystalline and amorphous silicon, Si0.9Ge0.1, SiO2, the damage created by beam causes density changes in irradiated region which eventually saturate with dose. were accompanied a transformation to phase. Superimposed on is plastic occurs irradiation both relieve stresses region. A wafer curvature measurement technique developed allows contributions from be distinguished stress dependence determined. Newtonian viscous shear flow, characteristic solids where governed diffusive motion point defects. The radiation-enhanced viscosity per was flux-independent, revealing that flow rapidly, probably within localized damaged regions each ion. This does not depend strongly material. fact, similar viscosities obtained measurements covalent samples polycrystalline aluminum films.
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